Invention Grant
- Patent Title: Photoacoustic gas sensor and method
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Application No.: US15791132Application Date: 2017-10-23
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Publication No.: US10551356B2Publication Date: 2020-02-04
- Inventor: David Tumpold , Christoph Glacer
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: G01N29/24
- IPC: G01N29/24 ; G01N33/00

Abstract:
A method for measuring the concentration of a gas includes heating a first gas with a pulse of light, the pulse of light having a wavelength absorbed by the first gas, wherein the first gas exerts pressure on a flexible membrane. The method includes receiving a first signal indicating a first deflection of the membrane, wherein the first deflection is due to a change in pressure of the first gas and receiving a second signal indicating a second deflection of the membrane occurring after the first signal, wherein the second deflection is due to the change in pressure of the first gas. The method includes determining a difference between the first signal and the second signal and, based on the difference between the first signal and the second signal, determining a first concentration of the first gas.
Public/Granted literature
- US20190120797A1 Photoacoustic Gas Sensor and Method Public/Granted day:2019-04-25
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