Thermal type flow meter, flow rate processing device, and thermal type flow rate measurement method using the same
Abstract:
A thermal type flow meter includes a first resistor (R1) is disposed along a flow path through which a fluid flows, generating heat when a current is applied, and outputting a first output signal indicating a heat generation temperature, a second resistor (R2) disposed at a position different from that of the first resistor along the flow path and outputting a second output signal indicating a temperature of the fluid, and a current application unit configured to apply a current to the first resistor so that the first output signal indicates a predetermined temperature. A parameter for converting the difference between the first output signal and the second output signal when a predetermined input is received if the current is applied into a target value is determined. The flow rate is acquired using the parameter, the difference detected after the parameter is determined, and a predetermined function.
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