Invention Grant
- Patent Title: Methods and devices for the high-volume production of silicon chips with uniform anti-reflective coatings
-
Application No.: US15568739Application Date: 2016-04-29
-
Publication No.: US10551165B2Publication Date: 2020-02-04
- Inventor: Christopher C. Striemer , Jared A. Carter , Wade Campney
- Applicant: ADARZA BIOSYSTEMS, INC.
- Applicant Address: US MO St. Louis
- Assignee: ADARZA BIOSYSTEMS, INC.
- Current Assignee: ADARZA BIOSYSTEMS, INC.
- Current Assignee Address: US MO St. Louis
- Agency: Polsinelli PC
- Agent Elton F. Dean, III
- International Application: PCT/US2016/030212 WO 20160429
- International Announcement: WO2016/179023 WO 20161110
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/67 ; G01B11/06 ; H01L21/673
Abstract:
This present disclosure generally relates to devices, methods, and systems for producing large numbers of SiO2 coated silicon chips with uniform film thickness controlled to angstrom and sub angstrom levels. The disclosure further relates to etching plates configured for receiving a plurality of chips mounted thereon.
Public/Granted literature
Information query
IPC分类:
