Heat removal element with thermal expansion coefficient mismatch
Abstract:
A heat removal element comprises a deformable frame, having a first coefficient of thermal expansion. The frame includes a set of separate cavities formed in the frame, the set including a first cavity and a second cavity; and on one side of the first cavity, a deformable wall adapted to provide mechanical compliance with a heat source for transferring heat away from the heat source. The second cavity comprises a material that fills, at least partly, the second cavity, this material having a second coefficient of thermal expansion that differs from the first coefficient of thermal expansion.
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