Invention Grant
- Patent Title: Non-volatile memory device and method of fabricating the same
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Application No.: US15647692Application Date: 2017-07-12
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Publication No.: US10546934B2Publication Date: 2020-01-28
- Inventor: Woo Young Choi
- Applicant: SK hynix Inc. , SOGANG UNIVERSITY RESEARCH FOUNDATION
- Applicant Address: KR Icheon KR Seoul
- Assignee: SK hynix Inc.,SOGANG UNIVERSITY RESEARCH FOUNDATION
- Current Assignee: SK hynix Inc.,SOGANG UNIVERSITY RESEARCH FOUNDATION
- Current Assignee Address: KR Icheon KR Seoul
- Priority: KR10-2016-0088850 20160713
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/792 ; H01L21/28 ; H01L27/1157 ; G11C16/04 ; H01L27/06 ; H01L27/115 ; H01L27/11568

Abstract:
Provided are a non-volatile memory device and a method of fabricating the same. The non-volatile memory includes a channel layer, a data storage layer disposed on the channel layer, a plurality of control gates arranged on the data storage layer and spaced apart from one another, and conductive cover layers disposed on sidewalls of the control gates facing each other. The plurality of control gates includes a first conductor having a first work function. The conductive cover layers include a second conductor having a second work function that is greater than the first work function.
Public/Granted literature
- US20180019134A1 NON-VOLATILE MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2018-01-18
Information query
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