Invention Grant
- Patent Title: BEOL vertical fuse formed over air gap
-
Application No.: US15956355Application Date: 2018-04-18
-
Publication No.: US10546813B2Publication Date: 2020-01-28
- Inventor: Marc A. Bergendahl , James J. Demarest , Christopher J. Penny , Christopher J. Waskiewicz
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/525 ; H01L23/532 ; H01L21/768 ; H01L23/522 ; H01L23/528

Abstract:
A method of forming an electrical device that includes forming a first level including an array of metal lines, wherein an air gap is positioned between the adjacent metal lines. A second level is formed including at least one dielectric layer atop the first level. A plurality of trench structures is formed in the at least on dielectric layer. At least one of the plurality of trench structures opens the air gap. A conductive material is formed within the trenches. The conductive material deposited in the open air gap provides a vertical fuse.
Public/Granted literature
- US20180240752A1 BEOL VERTICAL FUSE FORMED OVER AIR GAP Public/Granted day:2018-08-23
Information query
IPC分类: