Invention Grant
- Patent Title: Vibration device
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Application No.: US15705202Application Date: 2017-09-14
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Publication No.: US10541671B2Publication Date: 2020-01-21
- Inventor: Tamio Ikehashi , Shunta Maeda , Ryunosuke Gando , Yasushi Tomizawa
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Tokyo
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2016-238903 20161208
- Main IPC: G01C19/574
- IPC: G01C19/574 ; G01C19/5733 ; H03H9/24 ; G01C19/5621

Abstract:
According to one embodiment, a vibration device includes a first movable unit including first and second movable portions arranged in a direction parallel to a first axis and enabled to vibrate in the direction parallel to the first axis, a second movable unit enabled to vibrate in a direction parallel to a second axis perpendicular to the first axis, and a connection unit configured to connect the first and second movable units together, wherein the following relationship is satisfied fi>(1+1/(2Qa))fa where a resonant frequency of the first movable unit in an in-phase mode is denoted by fi, a resonant frequency of the first movable unit in an anti-phase mode is denoted by fa, and a Q factor of resonance of the first movable unit in the anti-phase mode is denoted by Qa.
Public/Granted literature
- US20180167053A1 VIBRATION DEVICE Public/Granted day:2018-06-14
Information query
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