Invention Grant
- Patent Title: Manufacturing method of vibrator
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Application No.: US14978580Application Date: 2015-12-22
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Publication No.: US10541630B2Publication Date: 2020-01-21
- Inventor: Daisuke Yokoyama
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JP2012-095705 20120419
- Main IPC: H02N2/00
- IPC: H02N2/00 ; H01L41/335 ; H01L41/337 ; H02N2/02 ; H02N2/10
Abstract:
A manufacturing method of a vibrator includes processing a tip of a contact part arranged on an elastic body of the vibrator by lapping or grinding processing so that part of the tip has a plane shape in part of a spherical shape.
Public/Granted literature
- US20160111981A1 VIBRATOR, VIBRATION TYPE DRIVING APPARATUS AND MANUFACTURING METHOD OF VIBRATOR Public/Granted day:2016-04-21
Information query
