Invention Grant
- Patent Title: Surface-emitting device, vertical external-cavity surface-emitting laser, and method for manufacturing surface-emitting device
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Application No.: US15428236Application Date: 2017-02-09
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Publication No.: US10541514B2Publication Date: 2020-01-21
- Inventor: Yoshitaka Kuraoka , Kentaro Nonaka , Tomohiko Sugiyama , Takashi Yoshino
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Aichi
- Assignee: NGK INSULATORS, LTD.
- Current Assignee: NGK INSULATORS, LTD.
- Current Assignee Address: JP Aichi
- Agency: Cermak Nakajima & McGowan LLP
- Agent Tomoko Nakajima
- Priority: JP2016-034005 20160225; JP2016-040853 20160303
- Main IPC: H01S5/343
- IPC: H01S5/343 ; H01S5/04 ; H01S5/183 ; H01S5/14 ; H01S5/32 ; H01S5/42 ; H01L21/20

Abstract:
A vertical external-cavity surface-emitting laser (VECSEL) whose blueshift is reduced also in a high intensity range of emitted laser light is realized. A surface-emitting device for VECSEL includes a base substrate made of GaN and c-axis oriented, and an emitter structure formed of a group 13 nitride semiconductor and provided on the base substrate. The emitter structure is formed of unit deposition parts, each of which is provided on the base substrate and includes a DBR layer having a distributed Bragg reflection structure and an active layer that has a multiple quantum well structure and generates excitation emission in response to irradiation with external laser light. A c-axis orientation of each of the unit deposition parts conforms to the c-axis orientation of the base substrate located directly below the unit deposition parts. Grooves are formed between the unit deposition parts.
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