Invention Grant
- Patent Title: Boosted vertical field-effect transistor
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Application No.: US15918800Application Date: 2018-03-12
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Publication No.: US10541329B2Publication Date: 2020-01-21
- Inventor: Injo Ok , Choonghyun Lee , Soon-Cheon Seo , Seyoung Kim
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Amin, Turocy & Watson, LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/417 ; H01L29/732 ; H01L29/08 ; H01L29/10 ; H01L29/45 ; H01L29/66 ; H01L21/8249 ; H01L27/06 ; H01L21/8238 ; H03K19/0944 ; H01L21/762 ; H01L29/06 ; H01L21/311 ; H01L21/324 ; H01L21/265

Abstract:
Techniques related to a boosted vertical field effect transistor and method of fabricating the same are provided. A logic device can comprise a vertical field effect transistor comprising a substrate, a first epitaxial layer and a second epitaxial layer. A bottom source/drain contact can be between a top surface and the first epitaxial layer and a top source/drain contact can be between the top surface and the second epitaxial layer at respective first portions of one or more vertical fins. The logic device can also comprise a boosted bipolar junction transistor. A bipolar junction transistor contact can be between the top surface and the second epitaxial layer at respective second portions of the one or more vertical fins. The respective first portions and the respective second portions can be opposite portions of the one or more vertical fins.
Public/Granted literature
- US20190280120A1 BOOSTED VERTICAL FIELD-EFFECT TRANSISTOR Public/Granted day:2019-09-12
Information query
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