Invention Grant
- Patent Title: 3D flash memory cells which discourage cross-cell electrical tunneling
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Application No.: US15966989Application Date: 2018-04-30
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Publication No.: US10541246B2Publication Date: 2020-01-21
- Inventor: Vinod R. Purayath
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L29/49

Abstract:
3-d flash memory cells and methods of manufacture are described. The devices and methods recess a compound floating gate in between the silicon oxide slabs which reduces the quantum probability of electron tunneling between vertically adjacent storage cells. The devices and methods further include a high work function nanocrystalline metal in the compound floating gate. A polysilicon buffer layer forms a portion of the compound floating gate. The polysilicon buffer layer allows the high work function nanocrystalline metal to be selectively deposited. The polysilicon buffer layer further protects the high work function nanocrystalline metal from oxidation with the gate oxide subsequently formed on the other side.
Public/Granted literature
- US20180374863A1 3D FLASH MEMORY CELLS WHICH DISCOURAGE CROSS-CELL ELECTRICAL TUNNELING Public/Granted day:2018-12-27
Information query
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