Invention Grant
- Patent Title: Vertical transistor with eDRAM
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Application No.: US15986203Application Date: 2018-05-22
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Publication No.: US10541242B2Publication Date: 2020-01-21
- Inventor: Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/306 ; H01L21/762 ; H01L27/108 ; H01L27/12 ; H01L29/66 ; H01L29/78 ; H01L29/08 ; H01L49/02 ; H01L21/3065

Abstract:
Structures and methods for making vertical transistors in the Embedded Dynamic Random Access Memory (eDRAM) scheme are provided. A method includes: providing an SOI substrate with a buried insulator layer therein, forming a trench through the substrate, filling the trench with a first polysilicon material, and after filling the trench with the first polysilicon material, i) growing a second polysilicon material over the first polysilicon material and ii) epitaxially growing a doped layer over the SOI substrate, wherein the grown second polysilicon material and epitaxially grown doped layer form a basis for a strap merging the doped layer and the second polysilicon material.
Public/Granted literature
- US20190363090A1 VERTICAL TRANSISTOR WITH EDRAM Public/Granted day:2019-11-28
Information query
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