Invention Grant
- Patent Title: Semiconductor device with reduced contact resistance
-
Application No.: US15245756Application Date: 2016-08-24
-
Publication No.: US10541172B2Publication Date: 2020-01-21
- Inventor: Kangguo Cheng , Sean Teehan , Alex J. Varghese
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/532 ; H01L23/31 ; H01L23/535

Abstract:
An interconnect structure and methods of forming the interconnect structure an interconnect dielectric including at least one contact landing within the interconnect dielectric and/or underlying the interconnect dielectric. The structure and methods include roughening an exposed surface of at least one contact landing to increase the surface area of a conductive metal subsequently disposed in a contact feature and in direct contact with the roughened surface of the least one contact landing.
Public/Granted literature
- US20180061762A1 SEMICONDUCTOR DEVICE WITH REDUCED CONTACT RESISTANCE Public/Granted day:2018-03-01
Information query
IPC分类: