Invention Grant
- Patent Title: Accelerometer with compatibility to complementary metal-oxide-semiconductor technologies
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Application No.: US15422138Application Date: 2017-02-01
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Publication No.: US10539587B2Publication Date: 2020-01-21
- Inventor: Thoralf Kautzsch , Steffen Bieselt
- Applicant: Infineon Technologies Dresden GmbH
- Applicant Address: DE Dresden
- Assignee: Infineon Technologies Dresden GmbH
- Current Assignee: Infineon Technologies Dresden GmbH
- Current Assignee Address: DE Dresden
- Agency: Harrity & Harrity, LLP
- Main IPC: G01P15/02
- IPC: G01P15/02 ; G01P15/08

Abstract:
An accelerometer may include a seismic mass to flex based on acceleration components perpendicular to a surface of a substrate. The seismic mass may include a first electrode and a portion of the substrate. A first surface of the seismic mass may be adjacent to a first cavity in the substrate, and a second surface of the seismic mass being adjacent to a second cavity. The first surface of the seismic mass and the second surface of the seismic mass may be on opposite sides of the seismic mass. The accelerometer may include a second electrode separated from the second surface of the seismic mass by at least the second cavity.
Public/Granted literature
- US20180217178A1 ACCELEROMETER WITH COMPATIBILITY TO COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR TECHNOLOGIES Public/Granted day:2018-08-02
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