Invention Grant
- Patent Title: Array of optoelectronic structures and fabrication thereof
-
Application No.: US15906316Application Date: 2018-02-27
-
Publication No.: US10529771B2Publication Date: 2020-01-07
- Inventor: Mattias B. Borg , Lukas Czornomaz , Veeresh V. Deshpande , Vladimir Djara , Heike E. Riel , Heinz Schmid
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel Morris, Esq.
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01S5/40 ; H01S5/30 ; H01L27/148 ; H01L31/0304 ; H01S5/026 ; H01S5/02 ; H01L31/12

Abstract:
A method of fabrication of an array of optoelectronic structures includes first providing a crystalline substrate having cells corresponding to individual optoelectronic structures to be obtained. Each of the cells includes an opening to the substrate. Then, several first layer portions of a first compound semiconductor material are grown in each the opening to at least partly fill a respective one of the cells and form an essentially planar film portion therein. Next, several second layer portions of a second compound semiconductor material are grown over the first layer portions that coalesce to form a coalescent film extending over the first layer portions. Finally, excess portions of materials are removed, to obtain the array of optoelectronic structures. Each optoelectronic structure comprises a stack protruding from the substrate of: a residual portion of one of the second layer portions; and a residual portion of one of the first layer portions.
Public/Granted literature
- US20180190693A1 ARRAY OF OPTOELECTRONIC STRUCTURES AND FABRICATION THEREOF Public/Granted day:2018-07-05
Information query
IPC分类: