Invention Grant
- Patent Title: Memory device
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Application No.: US16127634Application Date: 2018-09-11
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Publication No.: US10529735B2Publication Date: 2020-01-07
- Inventor: Reiko Komiya , Tatsuo Izumi , Takaya Yamanaka , Takeshi Nagatomo , Karin Takagi
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2018-045703 20180313
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; G11C8/14 ; G11C7/18 ; H01L27/11556 ; H01L27/11524

Abstract:
A memory device includes first electrode layers stacked in a first direction, a first semiconductor layer piercing the first electrode layers in a first direction, a first insulating film surrounding the first semiconductor layer, and a semiconductor base connected to the first semiconductor layer. The first insulating film includes a first film, a second film, and a third film provided in order in a second direction from the first semiconductor layer toward one of first electrode layers. Spacing in the first direction between the second film and the semiconductor base is wider than a film thickness of the third film in the second direction. A minimum width of an outer perimeter of the first semiconductor layer is substantially the same as a width of an outer perimeter at a portion of the first semiconductor layer piercing the most proximal first electrode layer.
Public/Granted literature
- US20190287997A1 MEMORY DEVICE Public/Granted day:2019-09-19
Information query
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