Invention Grant
- Patent Title: Apparatus and method for treating substrate and measuring the weight of the remaining liquid on the substrate
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Application No.: US15607361Application Date: 2017-05-26
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Publication No.: US10529595B2Publication Date: 2020-01-07
- Inventor: Hyo Won Lee , Young Hun Lee
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-Do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Procopio, Cory, Hargreaves & Savitch LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B05C11/10 ; B05C5/00 ; B05C5/02 ; H01L21/677
Abstract:
Disclosed are an apparatus and a method for liquid-treating a substrate. An apparatus for treating a substrate includes a liquid treating unit that liquid-treats a substrate by supplying a liquid onto a substrate, a weight measuring unit that measures a weight of the remained liquid on the substrate, and a transfer unit that transfers the substrate between the liquid treating unit and the weight measuring unit. Accordingly, the weight of the remained liquid may be measured more promptly.
Public/Granted literature
- US20170345688A1 APPARATUS AND METHOD FOR TREATING SUBSTRATE Public/Granted day:2017-11-30
Information query
IPC分类:
