Invention Grant
- Patent Title: Methods and apparatuses for wireless communication with a brush
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Application No.: US16116455Application Date: 2018-08-29
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Publication No.: US10405166B2Publication Date: 2019-09-03
- Inventor: Bradley Scott Withers , Corey Alan Hughes , Erik Scott Nelson , Steven Kenneth Christie , Brent Allan Best
- Applicant: Illinois Tool Works Inc.
- Applicant Address: US IL Glenview
- Assignee: Illinois Tool Works Inc.
- Current Assignee: Illinois Tool Works Inc.
- Current Assignee Address: US IL Glenview
- Agency: McAndrews, Held & Malloy, Ltd.
- Main IPC: H04W4/80
- IPC: H04W4/80 ; B08B1/00 ; A46B15/00 ; A46B13/02 ; H01L21/67
Abstract:
Provided is a disclosure for embodiments for a brush with communication capabilities, which is configured to clean a surface of, for example, a semiconductor wafer, as well as an offline brush conditioning system and a CMP system that can communicate with the brush.
Public/Granted literature
- US20190014460A1 METHODS AND APPARATUSES FOR WIRELESS COMMUNICATION WITH A BRUSH Public/Granted day:2019-01-10
Information query
