- Patent Title: Nanostructured substrates for improved lift-off of III-V thin films
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Application No.: US16261027Application Date: 2019-01-29
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Publication No.: US10403783B2Publication Date: 2019-09-03
- Inventor: Alan Chin , Cun-Zheng Ning
- Applicant: Alan Chin , Cun-Zheng Ning
- Applicant Address: US AZ Scottsdale
- Assignee: Arizona Board of Regents on behalf of Arizona State University
- Current Assignee: Arizona Board of Regents on behalf of Arizona State University
- Current Assignee Address: US AZ Scottsdale
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L21/02 ; H01L21/308 ; H01L31/046 ; H01L31/0352
Abstract:
Reusable nanostructured substrates for forming semiconductor thin films, such as those used in solar cells, are configured with nanopillars to permit improved lift-off of thin films.
Public/Granted literature
- US20190172966A1 NANOSTRUCTURED SUBSTRATES FOR IMPROVED LIFT-OFF OF III-V THIN FILMS Public/Granted day:2019-06-06
Information query
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