Invention Grant
- Patent Title: Three-dimensional semiconductor device
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Application No.: US15936602Application Date: 2018-03-27
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Publication No.: US10403633B2Publication Date: 2019-09-03
- Inventor: Nam Jae Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2017-0116715 20170912
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/1157 ; H01L27/11524 ; H01L27/11556 ; H01L27/11565 ; H01L27/11519 ; H01L27/11582 ; H01L27/11573 ; H01L27/11529

Abstract:
The semiconductor device include a lower insulating layer; a gate stack disposed over the lower insulating layer; a plurality of supports extending from the lower insulating layer toward the gate stack; a source layer disposed between the lower insulating layer and the gate stack; and a channel pattern including a connection part disposed between the source layer and the gate stack.
Public/Granted literature
- US20190081052A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2019-03-14
Information query
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