Invention Grant
- Patent Title: Method for manufacturing semiconductor device
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Application No.: US15437472Application Date: 2017-02-21
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Publication No.: US10403554B2Publication Date: 2019-09-03
- Inventor: Yuichi Onozawa
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki
- Priority: JP2015-052594 20150316
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L29/739 ; H01L21/285 ; H01L29/06 ; H01L29/40 ; H01L29/66 ; H01L29/78

Abstract:
A method for manufacturing a semiconductor device includes: digging first and second trenches at the top surface of a plate-like base-body portion; forming an insulating film in the inside of each of the first and second trenches; laminating a conductive film on the top surface of the base-body portion so as to bury the first and second trenches with the conductive film via the insulating film; testing insulation-characteristics of the insulating film by applying a voltage between the conductive film and the bottom surface of the base-body portion; and after testing the insulation-characteristics, selectively removing the conductive film from the top surface of the base-body portion, so as to define a gate electrode in the first trench and an separated-electrode in the second trench, the separated-electrode being separated from the gate electrode.
Public/Granted literature
- US20170162458A1 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Public/Granted day:2017-06-08
Information query
IPC分类: