Invention Grant
- Patent Title: Substrate rotary loader
-
Application No.: US14703851Application Date: 2015-05-04
-
Publication No.: US10403533B2Publication Date: 2019-09-03
- Inventor: Markus J. Stopper , Asaf Schlezinger
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module for a substrate inspection station is disclosed herein. The loading module includes two arms, a plurality of substrate grippers, two rotatable support members, a conveyor, and at least one actuator. Each arm has a first end and a second end, wherein the second end is opposite the first end. Each substrate gripper is disposed at a respective end of each arm. Each rotatable support member is coupled to a respective one of the arms. The conveyor is disposed between the rotatable support members. The at least one actuator is configured to rotate the arms about the rotatable support members to selectively position the grippers over the conveyor in a location that allows a substrate held by the gripper to be released onto the conveyor.
Public/Granted literature
- US20160325946A1 SUBSTRATE ROTARY LOADER Public/Granted day:2016-11-10
Information query
IPC分类: