Substrate conveying robot and substrate processing system
Abstract:
A control device is configured to make a robot arm and a substrate holding device execute a blade member advancing operation for advancing a pair of blade members into a substrate placing structure, a substrate receiving operation for receiving a substrate placed on an upper stage of the substrate placing structure by the blade member in a substrate non-holding state, and a substrate placing operation for placing the substrate on the blade member in a substrate holding state onto a lower stage. A timing of receiving a substrate by the substrate receiving operation is shifted from a timing of placing a substrate by the substrate placing operation. A substrate conveying robot capable of shortening the tact time upon conveying substrates regardless of the kind of substrate fixing method in the substrate holding device can be provided.
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