Invention Grant
- Patent Title: Substrate conveying robot and substrate processing system
-
Application No.: US15555585Application Date: 2016-03-03
-
Publication No.: US10403530B2Publication Date: 2019-09-03
- Inventor: Hirohiko Goto
- Applicant: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Applicant Address: JP Kobe-shi
- Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee: KAWASAKI JUKOGYO KABUSHIKI KAISHA
- Current Assignee Address: JP Kobe-shi
- Agency: Oliff PLC
- Priority: JP2015-041616 20150303
- International Application: PCT/JP2016/056636 WO 20160303
- International Announcement: WO2016/140318 WO 20160909
- Main IPC: B25J9/04
- IPC: B25J9/04 ; H01L21/687 ; H01L21/677 ; B25J11/00 ; B25J18/04 ; B25J15/00

Abstract:
A control device is configured to make a robot arm and a substrate holding device execute a blade member advancing operation for advancing a pair of blade members into a substrate placing structure, a substrate receiving operation for receiving a substrate placed on an upper stage of the substrate placing structure by the blade member in a substrate non-holding state, and a substrate placing operation for placing the substrate on the blade member in a substrate holding state onto a lower stage. A timing of receiving a substrate by the substrate receiving operation is shifted from a timing of placing a substrate by the substrate placing operation. A substrate conveying robot capable of shortening the tact time upon conveying substrates regardless of the kind of substrate fixing method in the substrate holding device can be provided.
Public/Granted literature
- US20180053672A1 SUBSTRATE CONVEYING ROBOT AND SUBSTRATE PROCESSING SYSTEM Public/Granted day:2018-02-22
Information query
IPC分类: