Invention Grant
- Patent Title: Carrier transport device and carrier transport method
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Application No.: US15550870Application Date: 2015-12-24
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Publication No.: US10403529B2Publication Date: 2019-09-03
- Inventor: Shinji Wakabayashi , Keisuke Kondoh
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2015-028153 20150217
- International Application: PCT/JP2015/085925 WO 20151224
- International Announcement: WO2016/132651 WO 20160825
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/677

Abstract:
A carrier transport device capable of delivering a carrier to and from an external transport device which transports the carrier is provided. The carrier transport device includes a housing on which the carrier is mountable, first ports provided in the housing and configured to deliver the carrier to and from the external transport device, second ports provided in the housing and provided with a lid opening/closing mechanism, and a transfer machine provided in the housing and configured to transfer the carrier. The first ports, the transfer machine and the second ports are disposed under a transport path of the external transport device. The first ports and the second ports are disposed on both sides of the transfer machine. The second ports are configured at multiple stages.
Public/Granted literature
- US20180033663A1 CARRIER TRANSPORT DEVICE AND CARRIER TRANSPORT METHOD Public/Granted day:2018-02-01
Information query
IPC分类: