Invention Grant
- Patent Title: Substrate storage and processing
-
Application No.: US15635263Application Date: 2017-06-28
-
Publication No.: US10403526B2Publication Date: 2019-09-03
- Inventor: Thomas Schober , Bernd Rahrbach , Christian Wohanka , Yves Fenner , Gerhard Dovids
- Applicant: MURATA MACHINERY, LTD.
- Applicant Address: JP Kyoto
- Assignee: MURATA MACHINERY, LTD.
- Current Assignee: MURATA MACHINERY, LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/687

Abstract:
The system, method and apparatus described relates generally to a device related to substrate storage and processing. In one example embodiment to methods, apparatus, and systems of a substrate storage and processing module improving upon existing devices used in one or more instances for substrate transportation, sorting, and cleaning. The single piece design system may contain and support substrates in a method, reducing strain on its contents by utilizing an innovative support system without the use of standard clamping techniques and, in this or other iterations, such stacking methods may minimize chaffing of surfaces. Thus the device is vastly improved in its ability to preserve pristine conditions of contained substrates.
Public/Granted literature
- US20170372930A1 Substrate Storage and Processing Public/Granted day:2017-12-28
Information query
IPC分类: