Invention Grant
- Patent Title: Chamber for degassing substrates
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Application No.: US15899600Application Date: 2018-02-20
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Publication No.: US10403522B2Publication Date: 2019-09-03
- Inventor: Jurgen Weichart
- Applicant: Evatec AG
- Applicant Address: CH Trübbach
- Assignee: EVATEC AG
- Current Assignee: EVATEC AG
- Current Assignee Address: CH Trübbach
- Agency: Pearne & Gordon LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/324
Abstract:
A heater or cooler chamber for a batch of more than one workpiece includes a heat storage block. In the block a multitude of pockets are provided, whereby each of the pockets may be closed or opened by a controllably operated door. A heater or cooler arrangement is applied. The pockets are tailored to surround a workpiece applied therein in a non-contact closely spaced manner.
Public/Granted literature
- US20180174872A1 CHAMBER FOR DEGASSING SUBSTRATES Public/Granted day:2018-06-21
Information query
IPC分类:
