Invention Grant
- Patent Title: Systems and methods for tuning an impedance matching network in a step-wise fashion for multiple states of an RF generator
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Application No.: US15635065Application Date: 2017-06-27
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Publication No.: US10403482B2Publication Date: 2019-09-03
- Inventor: Arthur M. Howald , John C. Valcore, Jr. , Andrew Fong , David Hopkins
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01J37/32

Abstract:
Systems and methods for tuning an impedance matching network in a step-wise fashion for each state are described. By tuning the impedance matching network in a step-wise fashion for each state instead of directly achieving optimum values of a radio frequency (RF) for each state and directly achieving an optimal value of a combined variable capacitance for each state, processing of a wafer using the tuned optimal values becomes feasible.
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