Invention Grant
- Patent Title: Solid-state laser device, solid-state laser system, and laser device for exposure device
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Application No.: US16124434Application Date: 2018-09-07
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Publication No.: US10374382B2Publication Date: 2019-08-06
- Inventor: Takashi Onose , Osamu Wakabayashi
- Applicant: GIGAPHOTON INC.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2016/061358 20160407
- Main IPC: H01S3/10
- IPC: H01S3/10 ; H01S3/23 ; H01S3/16 ; H01S3/067 ; G02F1/35 ; G02F1/355 ; H01S3/109 ; H01S3/115 ; H01S3/11 ; H01S3/108 ; G02F1/37 ; H01S3/131

Abstract:
A solid state laser device includes a seed laser that outputs continuous wave laser seed light, a light intensity changeable unit that changes a light intensity thereof and outputs seed pulse light, a CW excitation laser that outputs continuous wave excitation light, an amplifier that amplifies the seed pulse light and outputs amplified light based on an amplification gain increased by the excitation light, a wavelength conversion unit that converts a wavelength of the amplified light and outputs harmonic light, and a light intensity control unit that allows the light intensity changeable unit to output the seed pulse light after a certain time elapsed from an input of an external trigger signal each time the signal is input and output suppression light that suppresses an increase of the amplification gain in a period after an output of the seed pulse light until an input of a next external trigger signal.
Public/Granted literature
- US20190006817A1 SOLID-STATE LASER DEVICE, SOLID-STATE LASER SYSTEM, AND LASER DEVICE FOR EXPOSURE DEVICE Public/Granted day:2019-01-03
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