Invention Grant
- Patent Title: Method for manufacturing a magnetic memory device by pre-patterning a bottom electrode prior to patterning a magnetic material
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Application No.: US15859171Application Date: 2017-12-29
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Publication No.: US10374153B2Publication Date: 2019-08-06
- Inventor: Jorge Vasquez , Bartlomiej Adam Kardasz , Mustafa Pinarbasi , Girish Jagtiani
- Applicant: Spin Memory, Inc.
- Applicant Address: US CA Fremont
- Assignee: SPIN MEMORY, INC.
- Current Assignee: SPIN MEMORY, INC.
- Current Assignee Address: US CA Fremont
- Agency: Zilka-Kotab, P.C.
- Main IPC: G11C11/16
- IPC: G11C11/16 ; H01L43/02 ; H01L43/08 ; H01L43/10 ; H01L43/12 ; H01L21/768 ; H01L27/22

Abstract:
A method for manufacturing a magnetic random access memory element that allows for improved magnetic element pillar formation in a high density magnetic memory element array. The method allows a magnetic memory element pillar to be formed by ion milling with a lower pillar height for reduced shadowing effect. A memory element seed layer and under-layer are first formed on a substrate and layer of electrically insulating material such as silicon oxide is deposited. A chemical mechanical polishing process is performed, leaving the seed layer and under-layer surrounded by a layer of electrically insulating material having an upper surface that is coplanar with an upper surface of the under-layer. A magnetic memory element pillar is formed over the seed layer and under-layer by depositing the magnetic memory element material, forming a mask over the magnetic memory element material and performing an ion milling process to form a magnetic memory element pillar.
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