Invention Grant
- Patent Title: Imprint apparatus, imprint method, and method for manufacturing article
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Application No.: US15357740Application Date: 2016-11-21
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Publication No.: US10372034B2Publication Date: 2019-08-06
- Inventor: Kazuki Nakagawa , Kazuhiro Sato , Tsutomu Terao
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. I.P. Division
- Priority: JP2015-229179 20151124; JP2016-197284 20161005
- Main IPC: B29C59/16
- IPC: B29C59/16 ; G03F7/00 ; B29K105/24 ; B29L31/34 ; B29C59/02 ; B29C35/08 ; B29C35/02 ; G03F7/20

Abstract:
An imprint apparatus for forming a pattern of an imprint material on a substrate using a mold includes a heating unit, a generation unit, and a measurement unit. The heating unit irradiates a region to be processed on the substrate with light to heat the region to be processed. The generation unit generates irradiation amount distribution data, which indicates an irradiation amount distribution of light with which the heating unit is to irradiate the region to be processed. The measurement unit measures information about absorption of the light by the region to be processed. The generation unit generates the irradiation amount distribution data by correcting, using a result of measurement by the measurement unit, temporary irradiation amount distribution data temporarily generated based on a shape of the region to be processed taken before the region to be processed is heated by the heating unit.
Public/Granted literature
- US20170144363A1 IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR MANUFACTURING ARTICLE Public/Granted day:2017-05-25
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