Invention Grant
- Patent Title: Method for determining height information of a sample, and scanning microscope
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Application No.: US15419166Application Date: 2017-01-30
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Publication No.: US10371501B2Publication Date: 2019-08-06
- Inventor: Thomas Kalkbrenner , Helmut Lippert
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GMBH
- Current Assignee: Carl Zeiss Microscopy GMBH
- Current Assignee Address: DE Jena
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: DE102016203671 20160307
- Main IPC: G01J1/44
- IPC: G01J1/44 ; G01B11/06 ; G01B11/25 ; G02B21/00 ; G02B27/09

Abstract:
The invention relates to a method for determining height information of a sample, and to a scanning microscope. The method comprises the following steps: generating an illumination spot; illuminating the sample with the illumination spot; capturing an image of a reflection of the illumination spot at the sample; evaluating the lateral distribution of the image; determining the height information from the lateral distribution; wherein the illumination spot has a three dimensional illumination pattern and/or the image in a detection beam path has a three dimensional detection pattern. The scanning microscope is characterized in that an illumination device (07) and/or a detector device comprise(s) a means for generating a three dimensional pattern with a change in the lateral intensity distribution that is asymmetrical along the optical axis, and an evaluation device is configured to determine height information from the detector signal.
Public/Granted literature
- US20170254640A1 METHOD FOR DETERMINING HEIGHT INFORMATION OF A SAMPLE, AND SCANNING MICROSCOPE Public/Granted day:2017-09-07
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