Invention Grant
- Patent Title: Piezoelectric thin film, piezoelectric actuator, inkjet head, inkjet printer, and method for manufacturing piezoelectric actuator
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Application No.: US15575644Application Date: 2016-05-11
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Publication No.: US10369787B2Publication Date: 2019-08-06
- Inventor: Kenji Mawatari
- Applicant: KONICA MINOLTA, INC.
- Applicant Address: JP Tokyo
- Assignee: KONICA MINOLTA, INC.
- Current Assignee: KONICA MINOLTA, INC.
- Current Assignee Address: JP Tokyo
- Agency: Cantor Colburn LLP
- Priority: JP2015-105621 20150525
- International Application: PCT/JP2016/064044 WO 20160511
- International Announcement: WO2016/190110 WO 20161201
- Main IPC: H01L41/187
- IPC: H01L41/187 ; B41J2/14 ; B41J2/16 ; C04B35/491 ; C23C14/08 ; H01L41/09 ; H01L41/316 ; H01L41/319

Abstract:
A piezoelectric thin film is formed by adding a donor element to lead zirconate titanate. In the piezoelectric thin film, a molar ratio of lead to a total sum of zirconium and titanium is 105% or higher, and, when positive and negative coercive electric fields in polarization and electric field hysteresis are referred to as Ec (+) and Ec (−), respectively, a value of |Ec (+) |/|Ec (−) | is 0.5 or more and 1.5 or less.
Public/Granted literature
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