Invention Grant
- Patent Title: Microphone and method of manufacturing the same
-
Application No.: US15376012Application Date: 2016-12-12
-
Publication No.: US10341783B2Publication Date: 2019-07-02
- Inventor: Ilseon Yoo
- Applicant: HYUNDAI MOTOR COMPANY
- Applicant Address: KR Seoul
- Assignee: HYUNDAI MOTOR COMPANY
- Current Assignee: HYUNDAI MOTOR COMPANY
- Current Assignee Address: KR Seoul
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2016-0137786 20161021
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B81B7/00 ; B81C1/00 ; H04R31/00 ; H04R19/04 ; B81B3/00

Abstract:
A Micro Electro Mechanical System (MEMS) microphone is provided. The MEMS microphone includes: a substrate including an audio hole and having an oxide layer at a predetermined segment along an upper surface edge; a vibration electrode that is supported by a support layer that is formed along an upper surface edge in a state that is separated to the inside of the center from the oxide layer at an upper portion corresponding to the audio hole; a fixed electrode that is formed at an upper portion of the oxide layer and in which one side of the support layer is bonded to one side of a low surface; and a back plate that is formed at an upper portion of the fixed electrode and in which the other side of the support layer is bonded to one side of a low surface.
Public/Granted literature
- US20180115834A1 MICROPHONE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-04-26
Information query