Invention Grant
- Patent Title: Electronic device with a wire element extending from an electroconductive layer comprising zirconium carbide or hafnium carbide
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Application No.: US15532260Application Date: 2015-12-04
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Publication No.: US10340138B2Publication Date: 2019-07-02
- Inventor: Florian Dupont , Benoit Amstatt , Bérangère Hyot
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , ALEDIA
- Applicant Address: FR Paris FR Grenoble
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,ALEDIA
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,ALEDIA
- Current Assignee Address: FR Paris FR Grenoble
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: FR1461965 20141205
- International Application: PCT/EP2015/078640 WO 20151204
- International Announcement: WO2016/087634 WO 20160609
- Main IPC: H01L21/02
- IPC: H01L21/02 ; B82Y10/00 ; H01L31/0352 ; H01L31/0304 ; H01L31/0392 ; H01L31/18 ; H01L33/00 ; H01L33/06 ; H01L33/12 ; H01L33/32 ; H01L33/18 ; H01L29/06
Abstract:
The electronic device comprises a substrate (1), at least one semiconductor wire element (2) formed by a nitride of a group III material and an electroconductive layer (3) interposed between the substrate (1) and said at least one semiconductor wire element (2). Said at least one semiconductor wire element (2) extends from said electroconductive layer (3), and the electroconductive layer (3) comprises a carbide of zirconium or a carbide of hafnium.
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