Invention Grant
- Patent Title: Methods for fabricating electronic devices including substantially hermetically sealed cavities and getter films
-
Application No.: US15634535Application Date: 2017-06-27
-
Publication No.: US10336608B2Publication Date: 2019-07-02
- Inventor: Szu Huat Goh , Edy Susanto , Jeffrey Lam
- Applicant: Globalfoundries Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: C12Q1/68
- IPC: C12Q1/68 ; B81C1/00 ; B81B7/00 ; B81C99/00

Abstract:
Electronic devices and methods for fabricating electronic devices are provided. In one example, an electronic device includes an electronic device body structure having a substantially hermetically sealed cavity formed therein. A getter film is in fluid communication with the substantially hermetically sealed cavity. Conductive features are accessible from outside the substantially hermetically sealed cavity and are operatively coupled to the getter film for electrical communication with the getter film.
Public/Granted literature
Information query