Invention Grant
- Patent Title: Membrane components and method for forming a membrane component
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Application No.: US15885401Application Date: 2018-01-31
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Publication No.: US10336607B2Publication Date: 2019-07-02
- Inventor: Alfons Dehe
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: DE102017102190 20170203
- Main IPC: H01L29/82
- IPC: H01L29/82 ; B81C1/00 ; B81B3/00 ; H04R19/04 ; H04R7/10

Abstract:
A membrane component comprises a membrane structure comprising an electrically conductive membrane layer. The electrically conductive membrane layer has a suspension region and a membrane region. In addition, the suspension region of the electrically conductive membrane layer is arranged on an insulation layer. Furthermore, the insulation layer is arranged on a carrier substrate. Moreover, the membrane component comprises a counterelectrode structure. A cavity is arranged vertically between the counterelectrode structure and the membrane region of the electrically conductive membrane layer. In addition, an edge of the electrically conductive membrane layer projects laterally beyond an edge of the insulation layer by more than half of a vertical distance between the electrically conductive membrane layer and the counterelectrode structure.
Public/Granted literature
- US20180222749A1 MEMBRANE COMPONENTS AND METHOD FOR FORMING A MEMBRANE COMPONENT Public/Granted day:2018-08-09
Information query
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