Invention Grant
- Patent Title: Substrate transport appartatus with multiple movable arms utilizing a mechanical switch mechanism
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Application No.: US14305715Application Date: 2014-06-16
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Publication No.: US10335945B2Publication Date: 2019-07-02
- Inventor: Christopher Hofmeister , Alexander G. Krupyshev , Krysztof A. Majczak , Martin Hosek , Jay Krishnasamy
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: B25J9/04
- IPC: B25J9/04 ; B25J9/10 ; B25J9/12 ; H01L21/677 ; H01L21/687 ; B25J11/00

Abstract:
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.
Public/Granted literature
- US20140294551A1 SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM Public/Granted day:2014-10-02
Information query
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