Invention Grant
- Patent Title: Individually-tunable heat reflectors in an EPI-growth system
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Application No.: US15212691Application Date: 2016-07-18
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Publication No.: US10283637B2Publication Date: 2019-05-07
- Inventor: Shih-Wei Hung
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO, LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: F27B5/14
- IPC: F27B5/14 ; H01L29/78 ; H01L21/67 ; H05B3/00 ; H05B31/00 ; H01L21/8238 ; H01L29/66 ; H01L29/165 ; H01L21/324

Abstract:
A semiconductor fabrication system includes a wafer carrier configured to carry a wafer thereon. A radiation source is positioned above the wafer carrier. The radiation source is configured to emit thermal radiation. A plurality of reflectors is positioned above, and aligned with, an edge region of the wafer. The reflectors each have a reflective coating configured to reflect the thermal radiation. A plurality of separately-controllable motors is coupled to the reflectors, respectively. The motors are each configured to cause its respective reflector to rotate in a counterclockwise direction or a clockwise direction so as to redirect the thermal radiation back toward the edge region of the wafer. A controller is communicatively coupled to the plurality of motors. The controller is configured to control each of the motors separately to cause each motors to rotate independently of other motors.
Public/Granted literature
- US20180019136A1 Individually-Tunable Heat Reflectors in an EPI-Growth System Public/Granted day:2018-01-18
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