Invention Grant
- Patent Title: Integrated circuits with gate stacks
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Application No.: US15812350Application Date: 2017-11-14
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Publication No.: US10283623B2Publication Date: 2019-05-07
- Inventor: Kuan-Lun Cheng , Li-Shyue Lai , Ching-Wei Tsai , Kai-Chieh Yang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/49 ; H01L29/40 ; H01L29/51 ; H01L29/423 ; H01L21/28 ; H01L21/311

Abstract:
Examples of an integrated circuit with a gate stack and a method for forming the integrated circuit are provided herein. In some examples, a method includes receiving a workpiece that includes: a pair of sidewall spacers disposed over a channel region, a gate dielectric disposed on the channel region and extending along a vertical surface of a first spacer of the pair of sidewall spacers, and a capping layer disposed on the high-k gate dielectric and extending along the vertical surface. A shaping feature is formed on the capping layer and the high-k gate dielectric. A first portion of the high-k gate dielectric and a first portion of the capping layer disposed between the shaping feature and the first spacer are removed to leave a second portion of the high-k gate dielectric and a second portion of the capping layer extending along the vertical surface.
Public/Granted literature
- US20190035917A1 Integrated Circuits with Gate Stacks Public/Granted day:2019-01-31
Information query
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