Invention Grant
- Patent Title: 3D capacitor and method of manufacturing same
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Application No.: US15891959Application Date: 2018-02-08
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Publication No.: US10283613B2Publication Date: 2019-05-07
- Inventor: Chi-Wen Liu , Chao-Hsiung Wang
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L29/66 ; H01L49/02

Abstract:
A three-dimensional (3D) capacitor includes a semiconductor substrate; a fin structure including one or more fins formed on the semiconductor substrate; an insulator material formed between each of the one or more fins; a dielectric layer formed on a first portion of the fin structure; a first electrode formed on the dielectric layer; spacers formed on sidewalls of the first electrode; and a second electrode formed on a second portion of the fin structure. The first and second portions are different. The second electrode includes a surface that is in direct contact with a surface of the spacers.
Public/Granted literature
- US20180175164A1 3D Capacitor and Method of Manufacturing Same Public/Granted day:2018-06-21
Information query
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