Invention Grant
- Patent Title: Mirror driving device and driving method thereof
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Application No.: US15473221Application Date: 2017-03-29
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Publication No.: US10281716B2Publication Date: 2019-05-07
- Inventor: Takayuki Naono
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Studebaker & Brackett PC
- Priority: JP2014-201651 20140930
- Main IPC: G02B26/10
- IPC: G02B26/10 ; G02B26/08 ; H01L41/09 ; H01L41/18 ; B81B3/00

Abstract:
A piezoelectric actuator part which generates a driving force to rotate a mirror part about a rotation axis includes a first actuator part and a second actuator part having a both-end supported beam structure in which base end parts on both sides in an axial direction of the rotation axis are fixed. The first actuator part has a first electrode part and second electrode parts. The second actuator part has third electrode parts and a fourth electrode part. The arrangement of the each electrode part constituting an upper electrode corresponds to a stress distribution of principal stresses in a piezoelectric body during resonance mode vibration, and a piezoelectric portion corresponding to positions of the first electrode part and the third electrode parts and a piezoelectric portion corresponding to positions of the second electrode parts and the fourth electrode part generate stresses in opposite directions.
Public/Granted literature
- US20170205624A1 MIRROR DRIVING DEVICE AND DRIVING METHOD THEREOF Public/Granted day:2017-07-20
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