Invention Grant
- Patent Title: Micro heater and micro sensor
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Application No.: US15247530Application Date: 2016-08-25
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Publication No.: US10281418B2Publication Date: 2019-05-07
- Inventor: Bum Mo Ahn , Seung Ho Park , Sung Hyun Byun
- Applicant: Point Engineering Co., Ltd.
- Applicant Address: KR Asan-si, Chungcheongnam-do
- Assignee: Point Engineering Co., Ltd.
- Current Assignee: Point Engineering Co., Ltd.
- Current Assignee Address: KR Asan-si, Chungcheongnam-do
- Agency: Sunstein Kann Murphy & Timbers LLP
- Priority: KR10-2015-0125572 20150904
- Main IPC: G01N27/12
- IPC: G01N27/12 ; G01N33/00 ; H05B3/03 ; H05B3/26
Abstract:
A micro heater includes a heater electrode formed on a first supporting portion. A micro sensor further includes a sensor electrode formed on the first supporting portion. In the micro heater and the micro sensor an anti-etching dam is formed on the supporting portion. The dam protects the shape of the first supporting portion during etching.
Public/Granted literature
- US20170067842A1 Micro Heater and Micro Sensor Public/Granted day:2017-03-09
Information query
