Invention Grant
- Patent Title: Heat treatment apparatus
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Application No.: US14020190Application Date: 2013-09-06
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Publication No.: US10281214B2Publication Date: 2019-05-07
- Inventor: Hirofumi Kaneko , Kenichi Chiba
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Nath, Goldberg & Meyer
- Agent Jerald L. Meyer
- Priority: JP2012-197717 20120907
- Main IPC: F27D7/02
- IPC: F27D7/02 ; F27D7/06 ; F27B17/00 ; H01L21/67 ; H01L21/687

Abstract:
A heat treatment apparatus is provided with a reaction tube having a furnace opening formed at a lower end thereof, a lid body configured to hermetically seal the furnace opening of the reaction tube, a heat treatment boat supported on the lid body through a leg, and a rotating shaft extending through the lid body. The rotating shaft is connected to a lower end of the leg and configured to rotate the leg. The lid body is provided with a surrounding ring protruding upward to surround the lower end of the leg. An inert gas is supplied from an inert gas supply unit to a space between the lid body and the rotating shaft and discharged from a space between the lower end of the leg and the surrounding ring into the reaction tube.
Public/Granted literature
- US20140072924A1 HEAT TREATMENT APPARATUS Public/Granted day:2014-03-13
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