Fluid control device
Abstract:
A fluid control device (10) having a flow passage passing through a pump chamber (45) and a valve chamber (40) includes a vibration unit (37) that vibrates to cause fluctuation of an internal pressure in the pump chamber (45), a valve bottom plate (23) facing the valve chamber (40) and having a communication hole (43) communicating with the pump chamber (45) at one end and communicating with the valve chamber (40) at the other end, and a valve top plate (21) facing the valve chamber (40) to be opposed to the valve bottom plate (23) and having a discharge hole (41) communicating with the valve chamber (40). The communication hole (43) and the discharge hole (41) are not opposed to each other, and the valve bottom plate (23) is elastically deformed by transmission of vibration of the vibration unit (37) thereto.
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