Invention Grant
- Patent Title: Method of manufacturing plate with passage, plate with passage, temperature adjustment plate, cold plate, and shower plate
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Application No.: US13808783Application Date: 2011-07-06
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Publication No.: US10279441B2Publication Date: 2019-05-07
- Inventor: Toshihiko Hanamachi
- Applicant: Toshihiko Hanamachi
- Applicant Address: JP Yokohama-shi
- Assignee: NHK Spring Co., Ltd.
- Current Assignee: NHK Spring Co., Ltd.
- Current Assignee Address: JP Yokohama-shi
- Agency: Locke Lord LLP
- Priority: JP2010-157235 20100709
- International Application: PCT/JP2011/065507 WO 20110706
- International Announcement: WO2012/005305 WO 20120112
- Main IPC: F28F3/14
- IPC: F28F3/14 ; B23P15/26 ; C23C16/455 ; C23C16/458 ; F28F3/12 ; H01L21/67 ; C23C24/04

Abstract:
A plate with a passage and the like capable of shortening a process time than a previous one and of suppressing leakage from or contamination to the passage are provided. The plate with the passage is a plate in which the passage for causing a fluid to circulate therein is formed, and includes a body plate formed of a metal or an alloy and in which a groove serving as the passage is provided, a cover plate that covers the groove, and a deposition layer that is formed such that metal or alloy powder is accelerated with a gas and is sprayed on the body plate and the cover plate in a solid phase, and covers the cover plate.
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