Invention Grant
- Patent Title: Active matrix substrate and method for producing the same
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Application No.: US15775026Application Date: 2017-01-26
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Publication No.: US10263016B2Publication Date: 2019-04-16
- Inventor: Hisao Ochi , Tohru Daitoh , Hajime Imai , Tetsuo Fujita , Hideki Kitagawa , Tetsuo Kikuchi , Masahiko Suzuki , Teruyuki Ueda
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai
- Agency: Keating & Bennett, LLP
- Priority: JP2016-014104 20160128
- International Application: PCT/JP2017/002696 WO 20170126
- International Announcement: WO2017/131078 WO 20170803
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/786 ; G02F1/1362 ; H01L21/441 ; H01L29/24 ; H01L29/45 ; H01L29/66 ; G02F1/1368 ; G02F1/1345 ; H01L21/02

Abstract:
An active matrix substrate includes a first TFT (10), a second TFT (20) disposed per pixel, and a circuit including the first TFT. The first and second TFTs each include a gate electrode (102A, 102B), a gate insulating layer (103), an oxide semiconductor layer (104A, 104B), and source and drain electrodes in contact with an upper surface of the oxide semiconductor layer. The oxide semiconductor layer (104A, 104B) has a stacked structure including a first semiconductor layer (104e, 104c) in contact with the source and drain electrodes and a second semiconductor layer that is disposed on a substrate-side of the first semiconductor layer and that has a smaller energy gap than the first semiconductor layer. The oxide semiconductor layers (104A) and (104B) are different from each other in terms of the composition and/or the number of stacked layers. The first TFT has a larger threshold voltage than the second TFT.
Public/Granted literature
- US20180277574A1 ACTIVE MATRIX SUBSTRATE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2018-09-27
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