Invention Grant
- Patent Title: Cooling water jet pack for high power rotary cathodes
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Application No.: US15360122Application Date: 2016-11-23
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Publication No.: US10262843B2Publication Date: 2019-04-16
- Inventor: Robert Martinson , Paul Shufflebotham , Kevin Lynch , Heinrich von Bunau , Deborah Sloan , Daniel R. Juliano
- Applicant: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD.
- Current Assignee: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: The Marbury Law Group PLLC
- Main IPC: C23C14/35
- IPC: C23C14/35 ; C23C14/00 ; C23C14/34 ; H01J37/34

Abstract:
A sputtering target assembly, including a cylindrical backing tube, a magnet assembly disposed within the backing tube, and a conduit disposed within the backing tube and adapted for transporting coolant. The conduit includes at least one first opening positioned for providing the coolant in a substantially circumferential direction from the conduit toward an inner surface of the backing tube into a gap volume between a front side of the magnet assembly and the inner surface of the backing tube.
Public/Granted literature
- US20170140906A1 COOLING WATER JET PACK FOR HIGH POWER ROTARY CATHODES Public/Granted day:2017-05-18
Information query
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