Invention Grant
- Patent Title: Forming vertical transistors and metal-insulator-metal capacitors on the same chip
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Application No.: US15825614Application Date: 2017-11-29
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Publication No.: US10256231B2Publication Date: 2019-04-09
- Inventor: Kangguo Cheng , Ruilong Xie , Tenko Yamashita , Chun-Chen Yeh
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L49/02 ; H01L29/786 ; H01L29/423 ; H01L29/66

Abstract:
A device with a vertical transistor and a metal-insulator-metal (MIM) capacitor on a same substrate includes a vertical transistor including a bottom source/drain, a fin channel extending vertically from the bottom source/drain to a top source/drain, and a gate arranged around the fin channel, and the gate including a dielectric layer, a gate metal, and spacers arranged on opposing sides of the gate; and a MIM capacitor including a gate arranged over the bottom source drain, the gate including a gate metal and a dielectric layer, and a metal arranged in a depression in the bottom source/drain and extending through a channel in the gate to cover the gate, the metal directly contacting the dielectric layer of the gate.
Public/Granted literature
- US20180204833A1 FORMING VERTICAL TRANSISTORS AND METAL-INSULATOR-METAL CAPACITORS ON THE SAME CHIP Public/Granted day:2018-07-19
Information query
IPC分类: