Invention Grant
- Patent Title: Gate cut on a vertical field effect transistor with a defined-width inorganic mask
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Application No.: US15814258Application Date: 2017-11-15
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Publication No.: US10249753B2Publication Date: 2019-04-02
- Inventor: Brent A. Anderson , Sivananda K. Kanakasabapathy , Jeffrey C. Shearer , Stuart A. Sieg , John R. Sporre , Junli Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66

Abstract:
A method of cutting a gate on a VFET includes depositing a memorization layer around a spacer on a sidewall of the field effect transistor. A planarizing layer is patterned onto the memorization layer. An anti-reflective coating layer is patterned onto the planarizing layer. A photoresist layer is patterned onto the anti-reflective coating layer on ends of fins extending from a substrate. The planarizing layer, the anti-reflective coating layer, and the photoresist form a mask. The anti-reflective coating layer portion is etched from the VFET. The planarizing layer and the photoresist layer are arc etched from the VFET. The spacer is pulled down forming a void between gates on the VFET and exposing a hard mask on the fins. The hard mask is reactive ion etched vertically around the gates to form gates with a defined width mask. The memorization layer is removed from the VFET.
Public/Granted literature
- US20180097107A1 GATE CUT ON A VERTICAL FIELD EFFECT TRANSISTOR WITH A DEFINED-WIDTH INORGANIC MASK Public/Granted day:2018-04-05
Information query
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