Invention Grant
- Patent Title: Tunnel field-effect transistor and method for manufacturing tunnel field-effect transistor
-
Application No.: US15977309Application Date: 2018-05-11
-
Publication No.: US10249744B2Publication Date: 2019-04-02
- Inventor: Jing Zhao , Chen-Xiong Zhang
- Applicant: HUAWEI TECHNOLOGIES CO., LTD.
- Applicant Address: CN Shenzhen
- Assignee: HUAWEI TECHNOLOGIES CO., LTD.
- Current Assignee: HUAWEI TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Shenzhen
- Agency: Staas & Halsey LLP
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L21/02 ; H01L21/311 ; H01L29/786

Abstract:
A tunnel field-effect transistor and a method for manufacturing a tunnel field-effect transistor is disclosed. Source regions are located on two sides of an oxide structure, an epitaxial layer is located on a surface on a side that is of the source region and that is away from the oxide structure, and a gate structure is located on a surface on a side that is of the epitaxial layer and that is away from the source region, so that a gate electric field direction of the tunnel field-effect transistor is the same as an electron tunneling direction, and carriers on a valence band of the source region tunnel to a conduction band of the epitaxial layer at relatively high tunneling efficiency, thereby generating a steep subthreshold swing and enabling a subthreshold swing value of the tunnel field-effect transistor to be lower than 60 mV/dec to consume relatively low power.
Public/Granted literature
- US20180261689A1 TUNNEL FIELD-EFFECT TRANSISTOR AND METHOD FOR MANUFACTURING TUNNEL FIELD-EFFECT TRANSISTOR Public/Granted day:2018-09-13
Information query
IPC分类: